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Continuous YBa/sub 2/Cu/sub 3/O/sub 7-δ/ film deposition by optically controlled reactive thermal co-evaporation

1997; IEEE Council on Superconductivity; Volume: 7; Issue: 2 Linguagem: Inglês

10.1109/77.620706

1558-2515

B. Utz, S. Rieder-Zecha, H. Kinder,

ZnO doping and properties

We built a thermal co-evaporation system to deposit YBCO films on large areas in a continuous process which requires some basic modifications to the established standard co-evaporation setup. An optical rate control system based on atomic absorption spectroscopy has been developed to measure the individual metal fluxes, in addition the metal sources can be reloaded in-situ for long times. The performance of these new components is discussed and results of first YBCO films grown on small samples are shown.