Preparation and structural characterization of, and chemical vapor deposition studies with, certain yttrium tris(β‐diketonate) compounds
1996; Wiley; Volume: 2; Issue: 4 Linguagem: Inglês
10.1002/cvde.19960020405
ISSN1521-3862
AutoresHenry A. Luten, William S. Rees, Virgil L. Goedken,
Tópico(s)Phase Equilibria and Thermodynamics
ResumoAbstract The preparation of [Y(tmhd) 3 · H 2 O] 2 , Y(tmhd) 3 and [Y(tmhd) 3 ] 2 (tmhd = 2,2,6,6‐tetramethylheptane‐3,5‐dionate; tmod = 2,2,7‐trimethyloctane‐3,5‐dionate) are described. These compounds have been characterized by 1 H and 13 C NMR, IR, UV/vis, TGA and GC/MS techniques. Crystal data include: [Y(tmhd) 3 · H 2 O] 2 , Space Group P 1, a = 11.6 Å, b = 14.6 Å, c = 14.9 Å, α = 60.5°, β = 63.1°, γ = 73.3°, V = 1937 Å 3 , z = 2, d c = 1.095, ref coll = 7165, ref ind = 7165, ref sig = 4923, R = 7.0 %, R w = 8.8 %; [Y(tmod) 3 ] 2 , Space Group P 2 1 / n , a = 13.0 Å, b = 15.4 Å, c = 18.3 Å, β = 91.5°, V = 3670 Å 3 , z = 4, d c = 1.156, ref coll = 6642, ref ind = 6642, ref sig = 2649, R = 10.6 %, R w = 10.3 %. The vapor pressures of the compounds are discussed in the light of ligand symmetry concerns. Chemical vapor deposition experiments with these compounds produced films which were characterized by XRD, SEM, ESCA and surface profilometry. Film deposit composition and morphology are related to deposition ambient.
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