Characterisation of Device Grade Soi Structures formed by Implantation of High Doses of Oxygen
1983; Cambridge University Press; Volume: 27; Linguagem: Inglês
10.1557/proc-27-281
ISSN1946-4274
AutoresP.L.F. Hemment, E.A. Maydell-Ondrusz, K.G. Stephens, R.P. Arrowsmith, A.C. Glaccum, John A. Kilner, J.B. Butcher,
Tópico(s)Additive Manufacturing and 3D Printing Technologies
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