Characterisation of Device Grade Soi Structures formed by Implantation of High Doses of Oxygen

1983; Cambridge University Press; Volume: 27; Linguagem: Inglês

10.1557/proc-27-281

ISSN

1946-4274

Autores

P.L.F. Hemment, E.A. Maydell-Ondrusz, K.G. Stephens, R.P. Arrowsmith, A.C. Glaccum, John A. Kilner, J.B. Butcher,

Tópico(s)

Additive Manufacturing and 3D Printing Technologies

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