Optical parameters of oxide films typically used in optical coating production

2010; Optica Publishing Group; Volume: 50; Issue: 9 Linguagem: Inglês

10.1364/ao.50.000c75

ISSN

0003-6935

Autores

Alexander V. Tikhonravov, Michael K. Trubetskov, Tatiana V. Amotchkina, Gary W. DeBell, Vladimir Pervak, Anna Sytchkova, Maria Luisa Grilli, Detlev Ristau,

Tópico(s)

Advanced Surface Polishing Techniques

Resumo

Wavelength dependencies of refractive indices of thin film materials differ for various deposition conditions, and it is practically impossible to attribute a single refractive index wavelength dependence to any typical thin film material. Besides objective reasons, differences in the optical parameters of thin films may also be connected with nonadequate choices of models and algorithms used for the processing of measurement data. The main goal of this paper is to present reliable wavelength dependencies of refractive indices of the most widely used slightly absorbing oxide thin film materials. These dependencies can be used by other researchers for comparison and verification of their own characterization results.

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