Influence of growth temperature, working gas ratio, and buffer layer in ZnO films grown on (001) Si substrates by using rf-sputtering
2015; Springer Science+Business Media; Volume: 67; Issue: 4 Linguagem: Inglês
10.3938/jkps.67.676
ISSN1976-8524
AutoresKang-Bok Kim, Soo-Man Lee, D. C. Oh, Hang-Ju Ko,
Tópico(s)Ga2O3 and related materials
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