Charge compensation and high-resolution TOFSIMS imaging of insulating materials
1990; Wiley; Volume: 15; Issue: 1 Linguagem: Inglês
10.1002/sia.740150111
ISSN1096-9918
AutoresD. Briggs, M. J. Hearn, I. W. Fletcher, A.R. Waugh, Bruce McIntosh,
Tópico(s)Diamond and Carbon-based Materials Research
ResumoAbstract A charge compensation system, based on a pulsed lowenergy electron flood source, designed for the 1X23S time‐of‐flight secondary ion mass spectrometry (TOFSIMS) instrument is described. Its performance in the non‐imaging mode is illustrated by spectra from polytetrafluoroethene (PTFE). High‐resolution (∼1 pm) imaging of challenging insulating samples under near‐static SIMS conditions is demonstrated for the first time.
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