Artigo Revisado por pares

Formation of thermal decomposition cavities in physical vapor transport of silicon carbide

2000; Springer Science+Business Media; Volume: 29; Issue: 3 Linguagem: Inglês

10.1007/s11664-000-0075-7

ISSN

1543-186X

Autores

Edward Sanchez, Thomas Kuhr, V.D. Heydemann, David W. Snyder, Gregory S. Rohrer, Marek Skowroński,

Tópico(s)

Semiconductor materials and interfaces

Referência(s)
Altmetric
PlumX