Detector strategy for secondary and backscattered electrons using multiple detector systems
1985; Wiley; Volume: 7; Issue: 5 Linguagem: Inglês
10.1002/sca.4950070503
ISSN1932-8745
AutoresL. Reimer, Marianne Riepenhausen,
Tópico(s)X-ray Spectroscopy and Fluorescence Analysis
ResumoScanningVolume 7, Issue 5 p. 221-238 Original PaperFree to Read Detector strategy for secondary and backscattered electrons using multiple detector systems L. Reimer, L. Reimer Physikalisches Institut, Universität Münster, Domagkstr. 75, D-4400 Münster, FRGSearch for more papers by this authorM. Riepenhausen, M. Riepenhausen Physikalisches Institut, Universität Münster, Domagkstr. 75, D-4400 Münster, FRGSearch for more papers by this author L. Reimer, L. Reimer Physikalisches Institut, Universität Münster, Domagkstr. 75, D-4400 Münster, FRGSearch for more papers by this authorM. Riepenhausen, M. Riepenhausen Physikalisches Institut, Universität Münster, Domagkstr. 75, D-4400 Münster, FRGSearch for more papers by this author First published: 1985 https://doi.org/10.1002/sca.4950070503Citations: 33AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL References Alvarez A G, Bonetto R D, Guerin D M A, Peez C G: Images of the inner parts of scanning electron microscopes. Electron Optics Bull 120, Philips, Eindhoven 1984, pp 39– 43 Autrata R: A double detector system for BSE and SE imaging. 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Ed by D F Kyser et al, SEM Inc, AMF O'Hare 1982, pp 51– 68 Niemietz A, Reimer, L: Digital image processing of multiple detector signals in SEM. Ultramicroscopy 16, 161– 174 (1985) Reimer L: Monte-Carlo Rechnungen zur Elektronendiffusion. Optik 27, 86– 98 (1968) Reimer L: Contrast in the different modes of SEM. Scanning Electron Microscopy: systems and applications 1973 Conf Ser No 18, Inst of Physics, London 1973, pp 120– 125 Reimer L: Electron-specimen interactions in SEM. Developments in Electron Microscopy and Analysis. Ed by J A Venables, Academic Press, London 1976, pp 83– 88 Reimer L: Electron-specimen interactions. Scanning Electron Microscopy 1979/II, SEM Inc, AMF O'Hare, pp 111– 124 Reimer L: Electron signal and detector strategy. Electron Beam Interactions With Solids. Ed by D F Kyser et al, SEM Inc, AMF O'Hare 1982, pp 299– 310 Reimer L: Quantitative SEM of surfaces. 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Phys Stat Sol (b) 104, 161– 175 and 575–587 (1981) Schou J: Transport theory for kinetic emission of secondary electrons from solids. Phys Rev B 22, 2141– 2174 (1980) Seiler H, Kuhnle: Zur Anisotropie der Elektronenausbeute in Abhängigkeit von der Energie der auslösenden Primär-elektronen von 5–50 keV. Z angew Phys 29, 254– 260 (1970) Volbert B: True surface topography: the need for signal mixing. Electron Microscopy 1982, Vol 1, 233– 234, Deutsche Ges für Elektronenmikr, Frankfurt 1982 Volbert B, Reimer L: Advantages of two opposite Everhart-Thornley detectors in SEM. Scanning Electron Microscopy 1980/IV, SEM Inc, AMF O'Hare, pp 1– 10 Wells O C: Effect of collector position on type-2 magnetic contrast in the SEM. Scanning Electron Microscopy 1978/I, SEM Inc, AMF O'Hare, pp 293– 297 Wells O C: Effects of collector take-off angle and energy filtering on the BSE image in the SEM. Scanning 2, 199– 216 (1979) Yamamoto T: Experimental aspects of electron channeling patterns in SEM. Measurements of contrast. Phys stat sol (a) 44, 137– 146 (1977) Citing Literature Volume7, Issue51985Pages 221-238 ReferencesRelatedInformation
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