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Observation of a Strong Dose Dependence in 57 Co Implantations in Si and Ge

1979; Wiley; Volume: 93; Issue: 2 Linguagem: Inglês

10.1002/pssb.2220930246

1521-3951

G. Langouche, I. Dézsi, M. Van Rossum, J. Bruyn, R. Coussement,

Semiconductor materials and interfaces

physica status solidi (b)Volume 93, Issue 2 p. K107-K110 Short Note Observation of a Strong Dose Dependence in 57Co Implantations in Si and Ge G. Langouche, G. Langouche Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee Aangesteld Navorser N. F. W. O.Search for more papers by this authorI. Dézsi, I. Dézsi Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee On leave from the Central Research Institute for Physics, Budapest, Hungary.Search for more papers by this authorM. van Rossum, M. van Rossum Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee Search for more papers by this authorJ. de Bruyn, J. de Bruyn Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee Search for more papers by this authorR. Coussement, R. Coussement Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee Search for more papers by this author G. Langouche, G. Langouche Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee Aangesteld Navorser N. F. W. O.Search for more papers by this authorI. Dézsi, I. Dézsi Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee On leave from the Central Research Institute for Physics, Budapest, Hungary.Search for more papers by this authorM. van Rossum, M. van Rossum Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee Search for more papers by this authorJ. de Bruyn, J. de Bruyn Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee Search for more papers by this authorR. Coussement, R. Coussement Instituut voor Kern- en Stralingsfysika, Physics Department, University of Leuven, Heverlee Search for more papers by this author First published: 1 June 1979 https://doi.org/10.1002/pssb.2220930246Citations: 18 B-3030 Heverlee, Belgium. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Citing Literature Volume93, Issue21 June 1979Pages K107-K110 RelatedInformation