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Kinetics and Products of Molybdenum Disilicide Powder Oxidation

2002; Wiley; Volume: 85; Issue: 2 Linguagem: Inglês

10.1111/j.1151-2916.2002.tb00124.x

1551-2916

Yuntian Zhu, Li Shu, Darryl P. Butt,

Copper Interconnects and Reliability

In this study, we investigated the kinetics and products of the oxidation of MoSi 2 powder with an average particle size of 1.6 μm at 900°, 1000°, and 1100°C, using a small sample size of 0.5 g. Such a small sample size allowed us to minimize the effect of oxygen transportation through the powder volume, while maintaining a good relative weighing accuracy. X‐ray diffraction of oxidized samples indicated the formation of Mo 5 Si 3 and Mo metal. Analysis of the oxidation kinetics suggested that gaseous MoO 3 formed initially and amorphous SiO 2 film later. The oxidation kinetics and products observed in this study differ from those reported in an early study, in which a larger sample size was used.