Properties of diamond-like carbon film and its application as a protective layer in thin-film magnetic recording disks
1993; IEEE Magnetics Society; Volume: 29; Issue: 6 Linguagem: Inglês
10.1109/20.281350
ISSN1941-0069
AutoresY. Kokaku, Hiroaki Matsumoto, Hiroshi Inaba, Shigehiko Fujimaki, Makoto Kitoh, K. Abe,
Tópico(s)Adhesion, Friction, and Surface Interactions
ResumoWear rate of diamond-like carbon (DLC) protective layer deposited by a radio frequency plasma enhanced chemical vapor deposition method has been evaluated by continuous sliding tests using spherical sapphire pins. The influence of each property such as microstructure and microhardness on wear durability of the film is discussed. It has been found that the wear durability of the DLC film is several times superior to that of conventional sputtered carbon film. >
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