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AlGaN UV Focal Plane Arrays

2001; Wiley; Volume: 188; Issue: 1 Linguagem: Inglês

10.1002/1521-396x(200111)188

1521-396X

P. Lamarre, A. Hairston, S. P. Tobin, K. Wong, Anil K. Sood, M. B. Reine, M. Pophristić, R. Birkham, Ian T. Ferguson, R. Singh, Charles R. Eddy, U. Chowdhury, M.M. Wong, Russell D. Dupuis, P. Kozodoy, E. J. Tarsa,

Photocathodes and Microchannel Plates

This paper presents characterization data, including UV imagery, for 256 × 256 AlGaN UV Focal Plane Arrays (FPAs). The UV-FPAs have 30 × 30 μm2 unit cells, and use back-illuminated arrays of AlGaN p–i–n photodiodes operating at zero bias voltage. The photodiode arrays were fabricated from multilayer AlGaN films grown by MOCVD on sapphire substrates. Data are also presented for individual AlGaN photodiodes and variable-area diagnostic arrays.