High‐Performance and Tailorable Pressure Sensor Based on Ultrathin Conductive Polymer Film
2014; Wiley; Volume: 10; Issue: 8 Linguagem: Inglês
10.1002/smll.201303601
ISSN1613-6829
AutoresQi Shao, Zhiqiang Niu, Michael Hirtz, Lin Jiang, Yuanjun Liu, Zhaohui Wang, Xiaodong Chen,
Tópico(s)Mechanical and Optical Resonators
ResumoA highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa−1 to 17 kPa−1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated. As a service to our authors and readers, this journal provides supporting information supplied by the authors. Such materials are peer reviewed and may be re-organized for online delivery, but are not copy-edited or typeset. Technical support issues arising from supporting information (other than missing files) should be addressed to the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.
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