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Silicon thermal flow sensors

1992; Elsevier BV; Volume: 30; Issue: 1-2 Linguagem: Inglês

10.1016/0924-4247(92)80192-6

1873-3069

B.W. van Oudheusden,

Photonic and Optical Devices

This paper discusses the design and application of silicon thermal flow sensors. It is shown how the transduction path in the complete measurement system, going from flow variable to electrical signal, results in three fundamental problems, which can be associated with, respectively, the mechanical, thermal and electrical signal domains. These aspects are further discussed in relation to the silicon flow-sensor research performed at the Electronic Instrumentation Laboratory.