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Temperature-Compensated Structure For Saw Pressure Sensor In Very High Temperature

2007; Institute of Electrical and Electronics Engineers; Linguagem: Inglês

10.1109/freq.2007.4319026

1075-6787

Trang Hoang, Patrice Rey, Vaudaine Marie-Helene, Danel Jean-Sebastien, Robert Philippe, Benech Philippe, Pierre Lemaı̂tre-Auger,

Advanced MEMS and NEMS Technologies

This paper concerns the design and the analysis of a surface acoustic wave (SAW) pressure sensor that is capable to work in high temperature (up to 800degC) environment. Novel structures of the device are also presented for self-temperature compensation. Special attention is made on the different possible multilayer structures that could be used, the behavior of the sensor, the electromechanical coupling factor, the wave velocity as well as the required RF matching circuit. These parameters are critical issues for this special SAW sensor.