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Plasmon energy chemical phase mapping of reactive multilayers

2007; Wiley; Volume: 2; Issue: 1 Linguagem: Inglês

10.1002/pssr.200701229

1862-6270

Muhamad Azizi Mat Yajid, Thomas Wagner, G. Möbus,

Surface and Thin Film Phenomena

An analytical method of quantitative phase identification and mapping on the nanoscale is presented based on correlative similarity mapping from spectrum images within electron energy loss spectroscopy across the low-loss plasmon region. The method is applied to map the reaction layer formation for heat treated Cu–Al–Al2O3 thin films. Coexistence of residual Al pockets next to polycrystalline but epitaxial CuAl2 as main reaction product is found as well as a distinctive interfacial plasmon region. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)