Electrochemical Micromachining of Titanium Through a Laser Patterned Oxide Film
2001; Electrochemical Society; Volume: 4; Issue: 5 Linguagem: Inglês
10.1149/1.1359057
ISSN1944-8775
AutoresP.-F. Chauvy, P. Hoffmann, D. Landolt,
Tópico(s)Corrosion Behavior and Inhibition
ResumoSelective dissolution of titanium through a laser patterned oxide film has been achieved in a 3 M sulfuric acid-methanol electrolyte. The 250 nm thick oxide film was formed anodically on a flat titanium surface in 0.5 M sulfuric acid. The patterning of the film was obtained by local irradiation using a long pulse XeCl eximer laser. Electrochemical dissolution at irradiated lines on the oxide film yielded well-defined grooves comparable to those resulting from electrochemical micromachining through a photoresist mask. The described process permits electrochemical micromachining of titanium without photoresist and thus can lead to new applications of this technique. © 2001 The Electrochemical Society. All rights reserved.
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