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<title>White light interferometry</title>

2002; SPIE; Volume: 4737; Linguagem: Inglês

10.1117/12.474947

1996-756X

James C. Wyant,

Advanced Measurement and Metrology Techniques

White light interferometry is an extremely powerful tool for optical measurements. This paper discusses the advantages and disadvantages of white light interferometry compared to laser light interferometry. Three different white light interferometers are discussed: 1) diffraction gratin interferometers; 2) vertical scanning or coherence probe interferometers, and 3) white light scatterplate interferometers.