Semiconductor Sub‐Micro‐/ Nanochannel Networks by Deterministic Layer Wrinkling
2007; Volume: 19; Issue: 16 Linguagem: Inglês
10.1002/adma.200601622
ISSN1521-4095
AutoresYongfeng Mei, Dominic J. Thurmer, Francesca Cavallo, Suwit Kiravittaya, Oliver G. Schmidt,
Tópico(s)Electrowetting and Microfluidic Technologies
ResumoAdvanced MaterialsVolume 19, Issue 16 p. 2124-2128 Communication Semiconductor Sub-Micro-/ Nanochannel Networks by Deterministic Layer Wrinkling† Y. Mei, Y. Mei [email protected] Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569 Stuttgart (Germany) Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstrasse 20, 01069 Dresden (Germany)Search for more papers by this authorD. J. Thurmer, D. J. Thurmer Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569 Stuttgart (Germany) Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstrasse 20, 01069 Dresden (Germany)Search for more papers by this authorF. Cavallo, F. Cavallo Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569 Stuttgart (Germany)Search for more papers by this authorS. Kiravittaya, S. Kiravittaya Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569 Stuttgart (Germany)Search for more papers by this authorO. G. Schmidt, O. G. Schmidt Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstrasse 20, 01069 Dresden (Germany)Search for more papers by this author Y. Mei, Y. Mei [email protected] Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569 Stuttgart (Germany) Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstrasse 20, 01069 Dresden (Germany)Search for more papers by this authorD. J. Thurmer, D. J. Thurmer Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569 Stuttgart (Germany) Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstrasse 20, 01069 Dresden (Germany)Search for more papers by this authorF. Cavallo, F. Cavallo Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569 Stuttgart (Germany)Search for more papers by this authorS. Kiravittaya, S. Kiravittaya Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569 Stuttgart (Germany)Search for more papers by this authorO. G. Schmidt, O. G. Schmidt Institute for Integrative Nanosciences, IFW Dresden, Helmholtzstrasse 20, 01069 Dresden (Germany)Search for more papers by this author First published: 12 July 2007 https://doi.org/10.1002/adma.200601622Citations: 49 † We thank Dr. S. Mendach, Dr. C. Deneke, Dr. M. Stoffel, and Dr. A. Rastelli for helpful discussions, and U. Waizmann, A. Schulz, E. Coric, W. Winter, U. Zschieschang, and M. Riek for experimental assistance. We also thank Dr. Thamm at Karl Zeiss AG for use of the Axiocam HSm. This work is financially supported by the BMBF (03N8711). Supporting Information is available online from Wiley InterScience or from the author. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Graphical Abstract Semiconductor micro-/nanochannel networks are developed by deterministic layer wrinkling and applied into a fluidics study. Both linear (see figure) and circular nanochannel networks, consisting of a main channel and several perpendicularly oriented branch channels, are created, where the periodicity and position of the branch channels can be tuned and controlled by changing the width of the partially released layers and by applying appropriate lithography. Citing Literature Supporting Information Supporting information for this article is available on the WWW under http://www.wiley-vch.de/contents/jc_2089/2007/c1622_s.html or from the author. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article. Volume19, Issue16August, 2007Pages 2124-2128 RelatedInformation
Referência(s)