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Chemical Tailoring of Hybrid Sol−Gel Thick Coatings As Hosting Matrix for Functional Patterned Microstructures

2011; American Chemical Society; Volume: 3; Issue: 2 Linguagem: Inglês

10.1021/am100901m

1944-8252

Paolo Falcaro, Stefano Costacurta, Luca Malfatti, Dario Buso, Alessandro Patelli, Piero Schiavuta, M. Piccinini, Gianluca Grenci, Benedetta Marmiroli, Heinz Amenitsch, Plinio Innocenzi,

Mesoporous Materials and Catalysis

A phenyl-based hybrid organic - inorganic coating has been synthesized and processed by hard X-ray lithography. The overall lithography process is performed in a two-step process only (X-rays exposure and chemical etching). The patterns present high aspect ratio, sharp edges, and high homogeneity. The coating has been doped with a variety of polycyclic aromatic hydrocarbon functional molecules, such as anthracene, pentacene, and fullerene. For the first time, hard X-rays have been combined with thick hybrid functional coatings, using the sol-gel thick film directly as resist. A new technique based on a new material combined with hard X-rays is now available to fabricate optical devices. The effect due to the high-energy photon exposure has been investigated using FT-IR and Raman spectroscopy, laser scanner, optical profilometer, and confocal and electron microscope. High-quality thick hybrid fullerene-doped microstructures have been fabricated.