Portal de Periódicos da CAPES

A Method to Calibrate the Measured Responses by MEMS Accelerometers

2010; Wiley; Volume: 47; Issue: s2 Linguagem: Inglês

10.1111/j.1475-1305.2010.00764.x

1475-1305

Abdellatef E. Badri, Jyoti K. Sinha, Alhussein Albarbar,

Mechanical and Optical Resonators

Abstract: Micro‐electro‐mechanical system (MEMS) accelerometers have been receiving attention because of their low cost and small size. Accurate vibration measurements of both amplitude and phase at all frequencies in the measurement frequency range are important for the reliable vibration analysis. However, it has been observed that such accelerometers show some deviation. Hence, a simple calibration method in frequency domain has been used for correcting both amplitude and phase for the measured signals by the MEMS accelerometers. The paper presents the calibration procedure and results of this study applied on two MEMS accelerometers with different technical specifications.