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Patterned Formation of Highly Coherent Nitrogen-Vacancy Centers Using a Focused Electron Irradiation Technique

2016; American Chemical Society; Volume: 16; Issue: 4 Linguagem: Inglês

10.1021/acs.nanolett.5b05304

1530-6992

Claire A. McLellan, Bryan Myers, Stephan Kräemer, Kenichi Ohno, D. D. Awschalom, Ania C. Bleszynski Jayich,

Force Microscopy Techniques and Applications

We demonstrate fully three-dimensional and patterned localization of nitrogen-vacancy (NV) centers in diamond with coherence times in excess of 1 ms. Nitrogen {\delta}-doping during CVD diamond growth vertically confines nitrogen to 4 nm while electron irradiation with a transmission electron microscope (TEM) laterally confines vacancies to less than 1 {\mu}m. We characterize the effects of electron energy and dose on NV formation. Importantly, our technique enables the formation of reliably high-quality NV centers inside diamond nanostructures, with applications in quantum information and sensing.