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Removal of poly(methyl methacrylate) in diblock copolymers films studied by grazing incidence small-angle X-ray scattering

2016; Wiley; Volume: 54; Issue: 12 Linguagem: Inglês

10.1002/polb.24017

1099-0488

Guillaume Freychet, M. Maret, Raluca Tiron, Xavier Chevalier, Ahmed Gharbi, Marta Fernández-Regúlez, P. Gergaud,

Anodic Oxide Films and Nanostructures

Journal of Polymer Science Part B: Polymer PhysicsVolume 54, Issue 12 p. 1137-1144 Full Paper Removal of poly(methyl methacrylate) in diblock copolymers films studied by grazing incidence small-angle X-ray scattering Guillaume Freychet, Guillaume Freychet University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this authorMireille Maret, Corresponding Author Mireille Maret SIMAP, University of Grenoble Alpes, Grenoble, F38000 France SIMAP, CNRS, Grenoble, F-38000 FranceCorrespondence to: M. Maret (E-mail: [email protected])Search for more papers by this authorRaluca Tiron, Raluca Tiron University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this authorXavier Chevalier, Xavier Chevalier ARKEMA France, Route Nationale 117, Lacq, BP34-64170 FranceSearch for more papers by this authorAhmed Gharbi, Ahmed Gharbi University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this authorMarta Fernandez-Regulez, Marta Fernandez-Regulez University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this authorPatrice Gergaud, Patrice Gergaud University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this author Guillaume Freychet, Guillaume Freychet University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this authorMireille Maret, Corresponding Author Mireille Maret SIMAP, University of Grenoble Alpes, Grenoble, F38000 France SIMAP, CNRS, Grenoble, F-38000 FranceCorrespondence to: M. Maret (E-mail: [email protected])Search for more papers by this authorRaluca Tiron, Raluca Tiron University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this authorXavier Chevalier, Xavier Chevalier ARKEMA France, Route Nationale 117, Lacq, BP34-64170 FranceSearch for more papers by this authorAhmed Gharbi, Ahmed Gharbi University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this authorMarta Fernandez-Regulez, Marta Fernandez-Regulez University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this authorPatrice Gergaud, Patrice Gergaud University of Grenoble Alpes, Grenoble, F-38000 France CEA, LETI, MINATEC Campus, Grenoble, F-38054 FranceSearch for more papers by this author First published: 22 February 2016 https://doi.org/10.1002/polb.24017Citations: 10Read the full textAboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat ABSTRACT Self-assembly of diblock copolymers (BCP) into periodic arrays is a promising route to generate templates for the fabrication of nanoscopic elements, when one block is selectively removed. In cylindrical morphology polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) copolymer (BCP) films, the efficiency of different processes for removing the PMMA from cylinders is studied using grazing incidence small angle X-ray scattering (GISAXS), x-ray reflectivity and critical dimension scanning electron microscopy. The detailed analysis of the GISAXS patterns leads to the determination of the depth of cylindrical holes left by removal of the PMMA. It is found that the combination of a preliminary UV exposure followed by a wet treatment allows to remove totally the PMMA blocks. 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