Artigo
Effect of diluted colloidal silica slurry mixed with ceria abrasives on CMP characteristic
2016; Springer Science+Business Media; Volume: 3; Issue: 1 Linguagem: Inglês
10.1007/s40684-016-0002-x
ISSN2198-0810
AutoresYoungkyun Lee, Yong‐Jin Seo, Joo‐Ho Lee, Haedo Jeong,
Tópico(s)Advanced ceramic materials synthesis
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