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Doped SnO 2 Transparent Conductive Multilayer Thin Films Explored by Continuous Composition Spread

2015; American Chemical Society; Volume: 17; Issue: 4 Linguagem: Inglês

10.1021/co500185d

2156-8952

Jin Ju Lee, Jong‐Yoon Ha, Won-Kook Choi, Yong Soo Cho, Ji‐Won Choi,

Acoustic Wave Resonator Technologies

Mn-doped SnO₂ thin films were fabricated by a continuous composition spread (CCS) method on a glass substrate at room temperature to find optimized compositions. The fabricated materials were found to have a lower resistivity than pure SnO₂ thin films because of oxygen vacancies generated by Mn doping. As Mn content was increased, resistivity was found to decrease for limited doping concentrations. The minimum thin film resistivity was 0.29 Ω-cm for a composition of 2.59 wt % Mn-doped SnO₂. The Sn-O vibrational stretching frequency in FT-IR showed a blue shift, consistent with oxygen deficiency. Mn-doped SnO₂/Ag/Mn-doped SnO₂ multilayer structures were fabricated using this optimized composition deposited by an on-axis radio frequency (RF) sputter. The multilayer transparent conducting oxide film had a resistivity of 7.35 × 10⁻⁵ Ω-cm and an average transmittance above 86% in the 550 nm wavelength region.