Photoacid Generating Ligands for Development of Positive-Tone Directly Photopatternable Metal Complexes
2011; American Chemical Society; Volume: 27; Issue: 6 Linguagem: Inglês
10.1021/la104259f
ISSN1520-5827
AutoresChristopher E. J. Cordonier, Akimasa Nakamura, Kazuhiko Shimada, Akira Fujishima,
Tópico(s)Copper-based nanomaterials and applications
ResumoPhotoacid generating ligands, 4-(2-nitrobenzy-loxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol, and indium tin and titanium complexes thereof, were synthesized. These metal complexes perform as positive-tone, directly photopatternable indium tin oxide (ITO) or titanium oxide film precursors. After exposure, acid-bearing selectively soluble complexes could be removed to give patterned films upon developing in aqueous base, which were transformable to the corresponding pattern-preserving metal oxide film. Micropatterning of ITO and titanium oxide films was accomplished with the photoreactivity of the 2-nitrobenzyloxycarbonyl (NBOC) and 6-nitroveratryloxycarbonyl (NVOC) moiety bearing ligands.
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