Mechanical aspects of the chemical mechanical polishing process: A review
2016; Springer Science+Business Media; Volume: 17; Issue: 4 Linguagem: Inglês
10.1007/s12541-016-0066-0
ISSN2234-7593
AutoresHyunseop Lee, Dasol Lee, Haedo Jeong,
Tópico(s)Advanced machining processes and optimization
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