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BIBTEX RIS

Humidity Sensor Thanks Array of Suspended Gate Field Effect Transistor

2010; Institute of Physics; Volume: 31; Issue: 1 Linguagem: Inglês

10.1149/1.3474190

ISSN

2151-2051

Autores

Bruno da Silva Rodrigues, Olivier de Sagazan, Anne‐Claire Salaün, Samuel Crand, France Le Bihan, Tayeb Mohammed‐Brahim, Olivier Bonnaud, Nilton Itiro Morimoto,

Tópico(s)

Sensor Technology and Measurement Systems

Resumo

This work deals with a sensor using array of Suspended Gate Field Effect Transistor (SGFET) to measure the relative humidity (%RH). Technics of microtechnology are used to fabricate a polysilicon bridge with a gap de 0,5 µm which acts as transistor gate. Electrical measures have been realized by sampling mode, involving a sensitivity of -5 µA/%. Also the SGFET humidity sensors are very interesting due to the simplicity to polarize and to analyze the output signal.

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