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Plasmaaktiviertes Gasborieren mit Bortrifluorid

1997; De Gruyter; Volume: 52; Issue: 1 Linguagem: Inglês

10.1515/htm-1997-520113

2194-1831

Hans-Jörg Hunger, G. Trute, G. Löbig, D. Rathjen,

Diamond and Carbon-based Materials Research

It has been demonstrated both theoretically and experimentally that plasma boronizing can be carried out with boron trifluoride and that the boride layers are of practical value. It has also been revealed that the anticipated problems of corrosion when using boron trifluoride are much less acute than when boron trichloride is used. Since boron trifluoride is gaseous at room temperature, no evaporator boat is needed, and this cuts the cost of the overall plant.