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THE CONCEPT OF “VIRTUAL MICROSCOPE” FOR NANOMETROLOGY

2009; World Scientific; Linguagem: Inglês

10.1142/9789812839527_0054

1793-0901

A. V. Zablotskiy, A. S. Baturin, В. С. Бормашов,

Nanotechnology research and applications

Series on Advances in Mathematics for Applied SciencesAdvanced Mathematical and Computational Tools in Metrology and Testing, pp. 381-384 (2009) No AccessTHE CONCEPT OF "VIRTUAL MICROSCOPE" FOR NANOMETROLOGYA. V. ZABLOTSKIY, A. S. BATURIN, and V. S. BORMASHOVA. V. ZABLOTSKIYMoscow Institute of Physics and Technology (State University), Institutskiy per. 9, Dolgoprudny, Moscow region, 141700, Russia, A. S. BATURINMoscow Institute of Physics and Technology (State University), Institutskiy per. 9, Dolgoprudny, Moscow region, 141700, Russia, and V. S. BORMASHOVMoscow Institute of Physics and Technology (State University), Institutskiy per. 9, Dolgoprudny, Moscow region, 141700, Russiahttps://doi.org/10.1142/9789812839527_0054Cited by:0 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail Abstract: To prove the reliability of nanoscale measurements a new approach is proposed, which assumes joined analysis of experimental image and its analog produced by simulation in "virtual microscope". Uncertainties of "measured" parameters are evaluated using cross-correlation dependences between the parameters describing specimen shape and parameters of simulated image. FiguresReferencesRelatedDetails Advanced Mathematical and Computational Tools in Metrology and TestingMetrics History PDF download