Micro patterning of thin NdFeB films
1995; Elsevier BV; Volume: 148; Issue: 3 Linguagem: Inglês
10.1016/0304-8853(94)01705-0
ISSN1873-4766
AutoresH. Lemke, Thomas C. Lang, T. Göddenhenrich, C. Heiden,
Tópico(s)Magnetic properties of thin films
ResumoNd-Fe-B films of 1 μm thickness have been prepared by dc sputtering. Structural and magnetic film properties are analyzed by using an X-ray diffractometer and a vibrating reed magnetometer. For the investigation of surface morphological properties a scanning force microscope is used. Very smooth films have been examined with regard to their applicability for micro patterning. For that purpose micrometer size magnetic marks have been patterned. Magnetic fields were calculated and compared with magnetic force microscopy images of the marks.
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