Development of XY.THETA.Table Driven by Means of Walking Drive(2nd Report). Comparison of Driving Methods and Development of Compact Vertical XY.THETA.Table.
2001; Volume: 67; Issue: 8 Linguagem: Inglês
10.2493/jjspe.67.1259
ISSN1882-675X
AutoresEiji Shamoto, Hidetaka MATSUO, Rei HINO, Toshimichi MORIWAKI,
Tópico(s)Adhesion, Friction, and Surface Interactions
ResumoTwo driving methods based on the principle of 'walking drive' are summarized and compared in the present research. The predetermined displacement patterns are applied to the piezoelectric actuators in one method, and the patterns are generated in real time in the other method. Their characteristics are clarified, e.g. the former method is easier to implement while the latter can reduce the number of actuators. A compact XTθ table is developed based on the latter method. The developed XYθ table has unique characteristics such as compactness, ultra-fine positioning resolution, slow and smooth motion, long stroke, frictionless drive, no use of any conventional guides, no need to stack up multiple tables, no need for lubricant, and high stiffness. Furthermore, the developed table can be driven in the vertical plane, because the table is attached to the driving parts by a permanent magnet. A position feedback controller is developed with capacitive sensors, and some positioning experiments are carried out. The experiments show that the system has a fine positioning resolution of about 30nm which corresponds to the noise level of the sensors.
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