Flexible Magnetoresistive Sensors Designed for Conformal Integration
2016; IEEE Magnetics Society; Volume: 53; Issue: 4 Linguagem: Inglês
10.1109/tmag.2016.2623669
ISSN1941-0069
AutoresJ. Gaspar, Hélder Fonseca, Elvira Paz, Marco Martins, João Valadeiro, Susana Cardoso, Ricardo Ferreira, P. P. Freitas,
Tópico(s)Ferroelectric and Piezoelectric Materials
ResumoThis paper reports on the integration of magnetic tunnel junction (MTJ) sensing devices with magnetoresistance responses above 150% on flexible substrates. The sensors are integrated in a fabrication process based on polyimide materials, and demonstrate sensitivities up to 250 μV/Oe for bias currents in the 100-μA range. Assessment of the sensors performance is done under controlled mechanical load conditions, and the magnetoresistance is only slightly affected (1% variation) while sensitivity changes by 7.5% when the bending radii reduce down to 5 mm. The results demonstrate the high potential of the MTJ sensors to be used in applications requiring bending and conforming to non-planar geometries, bringing magnetoelectronic technologies to hard-to-reach regions of space.
Referência(s)