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Investigation of electrochemically etched GaAs (001) surface with the help of image processing

2009; Óbuda University; Volume: 6; Issue: 1 Linguagem: Inglês

2064-2687

Ákos Nemcsics, Miklós Schuszter, László Dobos, P. Turmezei,

Surface Roughness and Optical Measurements

Surface morphology of GaAs (001) surface after electrochemical layer removal with the help of image processing was investigated. The surface pattern of GaAs shown fractal behaviour under non-selective etching conditions. The morphological surface study was carried out using digital image processing of scanning electron microscope data. The surface patterns were segmented by the so called grade of membership method. Fractal behaviour of the surface morphology was established using the box counting method.