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RELAÇÃO ENTRE PARÂMETROS DE RUGOSIDADE OBTIDOS POR MICROSCOPIA DE FORÇA ATÔMICA E POR MICROSCOPIA ELETRÔNICA DE VARREDURA

2008; Volume: 17; Issue: 2 Linguagem: Inglês

10.17563/rbav.v17i2.256

1983-4047

R. Bernardes Filho, O. B. G. Assis, Juliana da Costa Santos Pessoa,

Surface Roughness and Optical Measurements

In this work data from atomic force microscopy (AFM) and scanning electron microscopy (SEM) concerning a ceramic surface roughness are analyzed and numerically compared. Gray scale lines corresponding to secondary backscattered electrons obtained by SEM, are normalized by means os the correspondent maximum height measured directly by AFM. The comparisons are carried out in terms of arithmetic average roughness Ra and by Rq roughness, presenting good concordance with numerical deviation not exceeding 15% between both techniques. The results point to the validate the proposed methodology.