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4D-STEM Imaging With the pnCCD (S)TEM-Camera

2015; Oxford University Press; Volume: 21; Issue: S3 Linguagem: Inglês

10.1017/s1431927615011836

1435-8115

Martin Simson, H. Ryll, Hiroyuki Banba, R. Hartmann, Martin Huth, Sebastian Ihle, Lewys Jones, Yukihito Kondo, Knut Müller‐Caspary, P.D. Nellist, Ryusuke Sagawa, Julia Schmidt, H. Soltau, Lothar Striider, Hao Yang,

Integrated Circuits and Semiconductor Failure Analysis

Journal Article 4D-STEM Imaging With the pnCCD (S)TEM-Camera Get access M Simson, M Simson PNDetector GmbH, SckellstraBe 3, 81667 Munchen, Germany Search for other works by this author on: Oxford Academic Google Scholar H Ryll, H Ryll PNSensor GmbH, Otto-Hahn-Ring 6, 81739 Munchen, Germany Search for other works by this author on: Oxford Academic Google Scholar H Banba, H Banba JEOL Ltd.,3-1-2 Musashino Akishima Tokyo 196-8558, Japan Search for other works by this author on: Oxford Academic Google Scholar R Hartmann, R Hartmann PNSensor GmbH, Otto-Hahn-Ring 6, 81739 Munchen, Germany Search for other works by this author on: Oxford Academic Google Scholar M Huth, M Huth PNSensor GmbH, Otto-Hahn-Ring 6, 81739 Munchen, Germany Search for other works by this author on: Oxford Academic Google Scholar S Ihle, S Ihle PNSensor GmbH, Otto-Hahn-Ring 6, 81739 Munchen, Germany Search for other works by this author on: Oxford Academic Google Scholar L Jones, L Jones Department of Materials, University of Oxford, 13 Parks Road, Oxford OX13PH, UK Search for other works by this author on: Oxford Academic Google Scholar Y Kondo, Y Kondo JEOL Ltd.,3-1-2 Musashino Akishima Tokyo 196-8558, Japan Search for other works by this author on: Oxford Academic Google Scholar K Muller, K Muller Universitat Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany Search for other works by this author on: Oxford Academic Google Scholar PD Nellist, PD Nellist Department of Materials, University of Oxford, 13 Parks Road, Oxford OX13PH, UK Search for other works by this author on: Oxford Academic Google Scholar ... Show more R Sagawa, R Sagawa JEOL Ltd.,3-1-2 Musashino Akishima Tokyo 196-8558, Japan Search for other works by this author on: Oxford Academic Google Scholar J Schmidt, J Schmidt PNSensor GmbH, Otto-Hahn-Ring 6, 81739 Munchen, Germany Search for other works by this author on: Oxford Academic Google Scholar H Soltau, H Soltau PNDetector GmbH, SckellstraBe 3, 81667 Munchen, Germany Search for other works by this author on: Oxford Academic Google Scholar L Striider, L Striider PNSensor GmbH, Otto-Hahn-Ring 6, 81739 Munchen, Germany Search for other works by this author on: Oxford Academic Google Scholar H Yang H Yang Department of Materials, University of Oxford, 13 Parks Road, Oxford OX13PH, UK Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 21, Issue S3, 1 August 2015, Pages 2211–2212, https://doi.org/10.1017/S1431927615011836 Published: 23 September 2015