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An Electron Microscope Pixel Array Detector as a Universal STEM Detector

2016; Oxford University Press; Volume: 22; Issue: S3 Linguagem: Inglês

10.1017/s143192761600324x

1435-8115

David A. Muller, Kayla X. Nguyen, Mark W. Täte, Prafull Purohit, Celesta S. Chang, Michael C. Cao, Sol M. Grüner,

Integrated Circuits and Semiconductor Failure Analysis

Journal Article An Electron Microscope Pixel Array Detector as a Universal STEM Detector Get access David A Muller, David A Muller School of Applied and Engineering Physics, Cornell University, Ithaca, NY, USAKavli Institute for Nanoscale Science, Cornell University Search for other works by this author on: Oxford Academic Google Scholar Kayla X Nguyen, Kayla X Nguyen Department of Chemistry and Chemical Biology, Cornell University, Ithaca, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Mark W Tate, Mark W Tate Department of Physics, Cornell University, Ithaca, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Prafull Purohit, Prafull Purohit Department of Physics, Cornell University, Ithaca, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Celesta Chang, Celesta Chang Department of Physics, Cornell University, Ithaca, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Michael Cao, Michael Cao School of Applied and Engineering Physics, Cornell University, Ithaca, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Sol M Gruner Sol M Gruner Department of Physics, Cornell University, Ithaca, NY, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 478–479, https://doi.org/10.1017/S143192761600324X Published: 25 July 2016