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Partial formation of linear concavo-convex microstructure onto microwells by diamond-like carbon thin film deposition

2017; Elsevier BV; Volume: 74; Linguagem: Inglês

10.1016/j.diamond.2017.02.021

1879-0062

Masahito Ban, Tsuyoshi Hagiwara, Yoshizumi Masumoto,

Surface Modification and Superhydrophobicity

By a procedure to partially deposit rigid diamond-like carbon (DLC) thin films using a mask on a soft elastomer, poly(dimethylsiloxane) (PDMS), substrate directionally stretched, areas with the regular linear pattern consisting of a periodical concavo-convex shape with several μm size were successfully formed onto microwells fabricated on the substrate. The DLC thin film depositions were performed by an inductively-coupled plasma (ICP) CVD method, and the optimal deposition conditions, mainly the substrate bias voltage of − 650 V, to form the linear pattern of the periodical concavo-convex shape were revealed. When an elongation strain applied on the PDMS substrate increased, the height of the concavo-convex shape increased. In addition, by an increase in the deposition time both height and width of the concavo-convex shape showed the tendency to increase. A model that the compressive stress arisen from the large mismatch of the elastic moduli between the DLC thin film and the PDMS substrate induces buckling of the film to produce the wrinkled microstructure was in close agreement with the obtained results.