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Dependence of Substrate Temperature and Working Gas Ratio in ZnO Films Grown on (001) GaAs Substrates by RF-Sputtering

2015; American Scientific Publishers; Volume: 11; Issue: 2 Linguagem: Inglês

10.1166/jno.2016.1866

ISSN

1555-1318

Autores

Soo-Man Lee, Kang-Bok Kim, Hang-Ju Ko, D. C. Oh,

Tópico(s)

ZnO doping and properties

Referência(s)