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3P1-Q06 Resonance type MEMS magnetic sensor with magnetostrictive thin film(MEMS and Nano-Technology)

2014; Japan Society Mechanical Engineers; Volume: 2014; Linguagem: Inglês

10.1299/jsmermd.2014._3p1-q06_1

2424-3124

Takashi NISHIKATA, Takashi Mineta, Takahiro Kawashima, Takayuki Shibata, Teio OKAZAKI, Yasubumi Furuya,

Neural Networks and Applications

Resonant-type mechanical magnetic sensors using magnetostrictive Fe_ Pd_ thin film stacked on Si cantilever and bridge MEMS structures were fabricated from SOI (silicon on insulator) substrate. Sol-gel PZT films were also stacked on the magnetic sensors for resonance vibration. The fabricated cantilever and bridge devices were successfully deflected by magnetostrictive effect of the FePd film. When static magnet flux of 200 Gauss was applied, the cantilever type (1000μm) was deformed to 3μm. Resonance characteristics were evaluated with internal vibration of PZT film. In case of cantilever type, Q factor of 330 was obtained at a resonance frequency of 9940 Hz. Resonance frequency increased by 13 Hz, and resonance amplitude drastically decreased to 15% by 200 Gauss applying.