A Dedicated Backscattered Electron Detector for High Speed Imaging and Defect Inspection
2017; Oxford University Press; Volume: 23; Issue: S1 Linguagem: Inglês
10.1017/s1431927617000733
ISSN1435-8115
AutoresMaximilian Schmid, A. Liebel, Roman Lackner, Daniel Steigenhöfer, A. Niculae, H. Soltau,
Tópico(s)Advanced Electron Microscopy Techniques and Applications
ResumoJournal Article A Dedicated Backscattered Electron Detector for High Speed Imaging and Defect Inspection Get access Maximilian Schmid, Maximilian Schmid PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar Andreas Liebel, Andreas Liebel PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar Robert Lackner, Robert Lackner PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar Daniel Steigenhöfer, Daniel Steigenhöfer PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar Adrian Niculae, Adrian Niculae PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar Heike Soltau Heike Soltau PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 23, Issue S1, 1 July 2017, Pages 10–11, https://doi.org/10.1017/S1431927617000733 Published: 04 August 2017
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