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Laser Patterning a Chem-FET Like Device on a V 2 O 5 Xerogel Film

2017; IEEE Sensors Council; Volume: 18; Issue: 4 Linguagem: Inglês

10.1109/jsen.2017.2786082

1558-1748

Manuel Fernando Gonzalez Huila, André L.A. Parussulo, Luis E. G. Armas, Henrique E. M. Peres, Antônio Carlos Seabra, Francisco J. Ramirez-Fernandez, Koiti Araki, Henrique E. Toma,

Analytical Chemistry and Sensors

Vanadium pentoxide xerogel films deposited onto gold microelectrodes were micropatterned by thermally induced conversion into crystalline α-V 2 O 5 , using optical lithography written at the focus of a confocal Raman microscope. The laser scribing process improved the electric contact and promoted the n-doping of the film with V IV ions. In this way, a field effect transistor like device was constructed and successfully applied as humidity sensor, where the combined lithographic design and the application of a negative back gate field (V G = -10.0 V) boosted the source-drain current by a hundred times, leading to a large gain in sensitivity.