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BIBTEX RIS

12 − μ m -Pitch Electromechanical Resonator for Thermal Sensing

2018; American Physical Society; Volume: 9; Issue: 2 Linguagem: Inglês

10.1103/physrevapplied.9.024016

ISSN

2331-7043

Autores

Ludovic Laurent, Jean-Jacques Yon, J.S. Moulet, M. L. Roukes, Laurent Duraffourg,

Tópico(s)

Photonic and Optical Devices

Resumo

For sensing temperature by measuring infrared radiation (in $e.g.$ night-vision goggles), most often bolometers are used, but there is another, possibly even better way. The authors show how to use nanoelectromechanical resonators as pixels for thermal sensing, including a complete electrical transduction chain, and the anomalous phase noise that ultimately limits the technique. A low-temperature process enables integrated-circuit fabrication, for dense and inexpensive imager production, and several suggestions for tenfold improvement of temperature sensitivity could allow these devices to surpass today's detectors.

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