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An Introduction to the Helium Ion Microscope

2006; Oxford University Press; Volume: 14; Issue: 4 Linguagem: Inglês

10.1017/s1551929500050240

2150-3583

John Morgan, John Notte, Raymond Hill, Bill Ward,

Surface and Thin Film Phenomena

Abstract In order to get high resolution images from any scanning beam microscope one must be able to produce a sufficiently small probe, have a small interaction volume in the substrate and have an abundance of information-rich particles to collect to create the image. A typical scanning electron microscope is able to meet all of these requirements to some degree. However, a helium ion microscope based on a Gas Field Ion Source (GFIS) has significant advantages over the SEM in all three categories.