Quantitative Microprose Analysis with Energy Dispersive Detectors - A Status Report

1975; International Centre for Diffraction Data; Volume: 19; Linguagem: Inglês

10.1154/s0376030800007758

ISSN

2631-3626

Autores

Eric Lifshin,

Tópico(s)

Mass Spectrometry Techniques and Applications

Resumo

Methods for quantitative microprobe analysis of flat samples with energy dispersive spectrometers are reviewed for the case when the electron beam is well contained in the analyzed region. Particular attention is paid to models for background subtraction and peak overlap necessitated by limited energy resolution. Present indications are that careful data collection procedures can often lead to accuracy comparable to crystal diffraction spectrometers.

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