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High-Sensitivity Visible-Blind AlGaN Photodiodes and Photodiode Arrays

2000; Cambridge University Press; Volume: 5; Issue: S1 Linguagem: Inglês

10.1557/s1092578300004051

1092-5783

J.D. Brown, J. Matthews, S. Harney, J. Boney, J. F. Schetzina, J. D. Benson, Khoa V. Dang, Thomas Nohava, Wei Yang, S. Krishnankutty,

Photocathodes and Microchannel Plates

Visible-blind UV cameras based on a 32 × 32 array of backside-illuminated GaN/AlGaN p-i-n photodiodes have been successfully demonstrated. The photodiode arrays were hybridized to silicon readout integrated circuits (ROICs) using In bump bonds. Output from the UV cameras were recorded at room temperature at frame rates of 30−240 Hz. These new visible-blind digital cameras are sensitive to radiation from 285−365 nm in the UV spectral region.