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Characterization and Gas Sensing Properties of Spin Coated WO 3 Thin Films

2019; De Gruyter; Volume: 234; Issue: 11-12 Linguagem: Inglês

10.1515/zpch-2018-1293

2196-7156

Sambhaji S. Shendage, Vithoba L. Patil, S.A. Vanalakar, Sarita P. Patil, J.L. Bhosale, Jin‐Hee Kim, P.S. Patil,

ZnO doping and properties

Abstract The WO 3 thin films have been synthesized on to the glass substrates by a simple and easy spin coating method at different deposition cycles and their sensor responses towards various concentrations of NO 2 gas were investigated. The WO 3 films were spin coated at a spinning rate of 2500–3000 rpm for 5, 10 and 15 deposition cycles, respectively. Then the films were annealed at 400 °C for 1 h in a furnace. The structural, morphological, optical and electrical properties of WO 3 films were studied by different characterization techniques such as X-ray diffraction (XRD), Scanning Electron Microscopy (SEM), FT-RAMAN Spectroscopy and electrical resistivity measurements by laboratory made two probe method respectively. It reveals a spherical grain – like morphology with a pure monoclinic phase of WO 3 . The FT-RAMAN spectra also confirm the pure monoclinic phase of WO 3 . The WO 3 -10 film sensor exhibits maximum gas sensitivity 21.93 and 102.4% to 5 and 100 ppm NO 2 at 200 °C, respectively. The WO 3 -10 thin film sensors is highly sensitive and selective to NO 2 over other gases.