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Superlensing plano-convex-microsphere (PCM) lens for direct laser nano-marking and beyond

2020; Optica Publishing Group; Volume: 45; Issue: 5 Linguagem: Inglês

10.1364/ol.380574

1539-4794

Bing Yan, Liyang Yue, James N. Monks, Xibin Yang, Daxi Xiong, Chunlei Jiang, Zengbo Wang,

Orbital Angular Momentum in Optics

A low-cost compound super-resolution lens, consisting of a Plano-Convex lens and a Microsphere lens (PCM), was proposed and demonstrated for subwavelength direct laser scanning writing application. The PCM lens can achieve a far-field super-resolution of ~{\lambda}/3.5 in air (~6 um away from lens) which surpasses resolution limit of existing commercial objective lenses and is the first of its kind. Arbitrary nano-patterns can now be directly fabricated on various substrates in a simpleand low-cost manner using developed PCM lens. The lens can also be used for other applications including nano-imaging and sensing as well in a confocal configuration. This work may lead to the development of next-generation low-cost direct laser nanofabrication machine and superresolution imaging nanoscope.