Propagation properties of leaky surface acoustic wave on water-loaded LiTaO 3 /quartz bonded structure
2020; Institute of Physics; Volume: 59; Issue: SK Linguagem: Inglês
10.35848/1347-4065/ab85ac
ISSN1347-4065
AutoresShoji Kakio, Yoshiki Kato, Ryota Suenaga, Masashi Suzuki, Ami Tezuka, Hiroyuki Kuwae, Hiroaki Yokota, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno,
Tópico(s)Analytical Chemistry and Sensors
ResumoRecently, bonded structures such as LiTaO3/quartz structures have been attracting attention as a means of obtaining high-performance surface acoustic wave (SAW) devices. To investigate the possibility of evaluating the acoustical loss in such bonded structures by subtracting the calculated leakage loss into the water from the measured normalized attenuation factor, propagation properties such as the velocity and normalized attenuation factor of leaky SAWs on a water-loaded 36°YX-LiTaO3/AT0°X-quartz bonded structure were investigated using a line-focus-beam ultrasonic material characterization system and were found to be in good agreement with the calculated values for both the 0°X and 90°X propagation directions.
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