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On-machine surface defect detection using light scattering and deep learning

2020; Optica Publishing Group; Volume: 37; Issue: 9 Linguagem: Inglês

10.1364/josaa.394102

1520-8532

Mingyu Liu, Chi Fai Cheung, Nicola Senin, Shixiang Wang, Rong Su, Richard Leach,

Advanced Measurement and Metrology Techniques

This paper presents an on-machine surface defect detection system using light scattering and deep learning. A supervised deep learning model is used to mine the information related to defects from light scattering patterns. A convolutional neural network is trained on a large dataset of scattering patterns that are predicted by a rigorous forward scattering model. The model is valid for any surface topography with homogeneous materials and has been verified by comparing with experimental data. Once the neural network is trained, it allows for fast, accurate, and robust defect detection. The system capability is validated on microstructured surfaces produced by ultraprecision diamond machining.